IEEE Nanotechnology Council
Advancing Nanotech for Humanity

EIPBN 2022 (The 65th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication)

65th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN)

“Nanotechnology in the Sciences and the Science of Nanotechnology.”

Download Flyer here (PDF)
May 31 – June 2, 2022
Sheraton New Orleans

The International EIPBN Conference is the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging, and analysis; atomically precise fabrication; nanofabrication process technologies; related emerging technologies, and their applications in a broad spectrum of fields.

This is the 65th meeting of the EIPBN, where top researchers from academia, government laboratories, and industry from around the world meet to present and discuss recent trends and future directions in these technologies.

The conference opens on Tuesday with a short course session in the morning followed by the beginning of a 3-day commercial session featuring materials and equipment vendors. Wednesday opens with the plenary session and a spotlight poster session showcasing the invited and contributed papers. The remainder of the conference will consist of three parallel oral sessions. Presentations (including questions) will be 30 minutes for invited papers and 20 minutes for contributed papers.

An important feature of the program is the poster session, which provides opportunity for extended discussions with the authors. Best Invited, Contributed, and Student Poster awards are presented during the banquet on Thursday evening. We are also looking forward to honoring a newly formed company that best communicates its business model, market, and vision with the Best Startup Award. Throughout the conference there will be several focused workshops and networking events including the welcome reception, the Women in Nanotechnology luncheon, the Student Mentor Mixer, and the Student Recruiting Breakfast.


Abstracts should be submitted on the EIPBN website. Abstracts are limited to one page of text (12 point or larger type) and an optional second page with up to four figures. Check the EIPBN website for details.

Abstract deadline is Sunday, January 30, 2022

Please prepare abstracts carefully and describe accomplishments specifically. Authors will be notified of acceptance by Sunday, April 3, 2022. Late submissions may be considered if the results are truly outstanding.

Manuscripts must be submitted immediately following the conference and will be subjected to a critical peer review before being accepted for publication in the Nov/Dec 2022 issue of the Journal of Vacuum Science and Technology (JVST). Each year the editors of JVST select the “Best Journal Paper Award.” The award will be announced, and presentations made at the following year’s EIPBN conference banquet. Submitted manuscripts will automatically be eligible for the award.

Technical Scope

Technical content highlighted in the conference includes, but is not limited to, the following topics:

· Electron and ion-beam lithography
· Advanced micro- and nanolithography
· Beam shaping design and tools
· Nanoimprint lithography
· Scanning probes techniques
· Atomically precise fabrication
· Directed self-assembly
· Bioinspired nanostructures
· Nano-electronics
· Nanofabrication for quantum computing
· Nanofabrication for neuromorphic computing
· Nanofabrication for energy applications
· Micro- and nano- electromechanical systems
· Micro- and nano- fluidics
· Biomedical devices
· Nano-biology and medicine
· Nanophotonics and nanoplasmonics
· Metamaterials and meta-lenses
· Micro/nanoscale additive manufacturing
· Nanofabrication for 2D materials and devices
· Resists and resist processing
· Simulation and modeling for the nanoscale
· Cold atom ion and electron sources
· Cutting-edge industrial developments


Registration is now open. Early registration and special student rates are available. See the EIPBN website for details.
Early registration deadline is Sunday, April 17, 2022
Last day to register online is Sunday, May 15, 2022. We strongly encourage you to register during early registration.

Important Dates and Deadlines

  • Conference dates:  May 31 – June 3, 2022
  • Early booth registration ends:  January 2, 2022
  • Abstract deadline:  January 30, 2022
  • Startup deadline:  January 30, 2022
  • Acceptance notification:  April 3, 2022
  • Early registration ends:  April 17, 2022


The EIPBN is incorporated as a nonprofit organization in the state of New Jersey and is co-sponsored by the American Vacuum Society ( IEEE Nanotechnology Council is a technical sponsor of EIPBN 2022.


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