IEEE Nanotechnology Council
Advancing Nanotech for Humanity

Technical Activities

Technical Activities

Technical Activities oversees the NTC Chapters and the Technical Committees.

The Technical Activities Committee is chaired by the Vice-President for Technical Activities and includes Chairs of all of the Technical Committees and the Chair of the Chapters and Regional Activities Committee of the Council.

See the Chapters page for information on the NTC Professional and Student Chapters and how to start a new one. See the Chapters and Regional Activities Committee page for Regional Chapter contacts.

NTC has a number of Technical Committees. See the Technical Committees page for committee descriptions and contacts.

The NTC Technical Activities Committee (TAC) is in charge of the coordination of NTC Technical Committees (TCs). The NTC TAC is chaired by the NTC VP TA and includes the Chairs of all TCs and the Chair of the Chapters and Regional Interest Groups. Working with the other NTC boards, the TAC focuses on the research content of the IEEE Nanotechnology Council, tracking technical developments and encouraging innovation in: applications, theory, models, metrics, experiments, architectures, products, initiatives, and other technical areas. Its Technical Committees form the core of the NTC’s functions, contributing to the NTC Publications, Conferences and Educational programs.

Technical Activities Committee Members


Kremena Makasheva
Vice President Technical Activities
Kremena MAKASHEVA is Senior Researcher at CNRS, Laboratory on Plasma and Conversion of Energy (LAPLACE), Toulouse, France. She obtained a Ph.D. degree on Plasma Physics from Sofia University, Bulgaria, 2002, for her work on surface wave sustained plasmas. In 2003 she joined the Université de Montréal, Canada for almost 4 years to work on surface wave plasmas at atmospheric pressure and especially to study the contraction phenomenon of electrical gas discharges. In 2007 she moved to Toulouse, France to work in LAPLACE laboratory on modeling microwave plasmas sustained by dipolar plasma sources. Since 2009 she works on plasma deposition of nanostructured thin dielectric layers, their characterization and analysis in relation with the dielectric charging phenomenon. Multifunctionality of silver nanoparticles (AgNPs) is in the heart of her research. In 2015 she and her colleagues proposed AgNPs-based blocking nanocomposite layers to control the transport of injected charges in thin dielectrics. Her research activities are directed to study of reactive plasmas, design and study of plasma deposited nanostructured dielectric materials containing AgNPs for biomedical, optical and electrical engineering applications. She serves IEEE Nanotechnology Council (IEEE NTC) with different actions, as General Chair of the 11th IEEE Nanotechnology Materials and Devices Conferences (IEEE NMDC) in 2016 in Toulouse and of the 16th IEEE NMDC 2021 in Vancouver, as Vice-Chair of the IEEE NTC Summer School on Nanotechnology for electronics in 2017 and currently as IEEE NTC Vice-President for Technical Activities 2020-2021.
Lan Fu
Chair of the Chapters and Regional Interest Groups
Lan Fu received her PhD degree from the Australia National University (ANU) in 2001 and is currently a Full Professor at the Research School of Physics, ANU. Prof. Lan Fu was the recipient of the IEEE Photonic Society Graduate Student Fellowship (2000), Australian Research Council (ARC) Postdoctoral Fellowship (2002), ARF/QEII Fellowship (2005) and Future Fellowship (2012). Professor Fu is a senior member of IEEE, IEEE/Photonics and Electron Devices Societies and was the past chair of the Photonics Society, Electron Devices Society and Nanotechnology Council Chapters of the IEEE ACT section. She is also the current member of the Australian Academy of Science National Committee on Materials Science and Engineering, Secretary of the Executive Committee of Australian Materials Research Society (AMRS), and Australian Research Council College of Experts. Lan Fu’s main research interests include design, fabrication and integration of optoelectronic devices (LEDs, lasers, photodetectors and solar cells) based on low-dimensional III-V compound semiconductor structures including quantum wells, self-assembled quantum dots and nanowires grown by metal-organic chemical vapour deposition (MOCVD).
Kin Fong (Thomas) Lei
Chair TC 1: Nanorobotics & Nanomanufacturing
Dr. Kin Fong Lei is a Professor in Biomedical Engineering at Chang Gung University (CGU), Taiwan. Prior to joining CGU, he was a Lecturer at The Hong Kong Polytechnic University, Hong Kong (2007-2010). He received B.S. degree from National Tsing-Hua University, Taiwan (1998), and Ph.D. degree from The Chinese University of Hong Kong, Hong Kong (2005). In 2006, he was a post-doctoral fellow at the University of Western Ontario, Canada. Dr. Lei has made significant original contributions to research in Micro/Nano fabrication and Micro/Nano fluidics. He has published over 100 academic articles and was invited to contribute to 8 book/book chapters. Dr. Lei is a Fellow of the Royal Society of Chemistry (RSC), Fellow of the Institute of Physics (IOP), Senior Member of the Institute of Electrical and Electronics Engineers (IEEE), Member of the American Society of Mechanical Engineers (ASME), and Member of the Society for Laboratory Automation and Screening (SLAS). He serves as a Chair of IEEE-EMBS Technical Committee on Bionanotechnology and BioMEMS (BNM) in 2020 and Associate Editor at EMBS Conference Editorial Board in 2020. He also served as an organizing committee member for many IEEE conferences for MEMS/microfluidics researchers, e.g., IEEE-NEMS 2017 (Los Angeles), 2018 (Singapore), and 2019 (Bangkok). Dr. Lei is an Associate Editor for IEEE Access and IEEE Transactions on NanoBioscience, and Editorial Board Member for Scientific Reports.
Haibo YU
Chair TC 2: Nano-Biomedicine
Dr. Haibo YU (于海波) is a full professor at the Shenyang Institute of Automation, Chinese Academy of Sciences. He received his BSc degree in Mechatronic Engineering and his MSc in Mechatronic Engineering from Yanshan University, China, in 2002 and in 2006, respectively. He received his PhD degree in Mechatronic Engineering from Shenyang Institute of Automation (SIA), Chinese Academy of Sciences (CAS) in 2012. From November 2009 to March 2012, he had studied in the Department of Back-end of Line of Fraunhofer ENAS as an exchange student in Germany, which was funded by the Joint Doctoral Promotion Programme promoted by the Chinese Academy of Sciences and Fraunhofer Gesellschaft. His research interests include: nanorobotics; mnno-material-based sensors; micro/nano-scale electrokinetics. He has served as an investigator for more than 5 grants from agencies such as Chinese National 863 Plan Projects, National Natural Science Foundation of China, and Chinese Academy of Sciences.
Wei Wu
Chair TC 3: Nanofabrication
Wei Wu graduated from Peking University with a BS in Physics in 1996, and received a Ph.D. in Electrical Engineering from Princeton University in 2003. He is an Associate Professor at the Ming Hsieh Department of Electrical and Computer Engineering, University of Southern California. Before joining USC in 2012, he had worked as research associate, scientist and senior scientist at HP labs. His work includes nanoimprint lithography and applications in nano-electronics, nano-photonics, plasmonics, chemical sensing and nano-electrochemical cells. He coauthored 106 peer reviewed journal papers with 9371 citations, 2 book chapters and more than 100 conference presentations, including 14 keynote and invited presentations. He has 117 granted US. Half of them were also filed internationally. He is a co-editor of Applied Physics A and an associate editor of IEEE Transactions on Nanotechnology. He was also an IEEE Nanotechnology Council 2015 and 2016 distinguished lecturer, and a recipient of USC Stevens Center for Innovation Commercialization Award 2020.
Reuven Gordon
Chair TC 4: Nano-Optics, Nano-Photonics, and Nano-Optoelectronics
Professor in the Department of Electrical and Computer Engineering, University of Victoria. He has received a Canadian Advanced Technology Alliance Award (2001), an Accelerate BC Industry Impact Award (2007), an AGAUR Visiting Professor Fellowship (2009), the Canada Research Chair in Nanoplasmonics (2009-2019), the Craigdarroch Silver Medal for Research Excellence (2011), a Fulbright Fellowship (2016), an NSERC Discovery Accelerator (2017), the Faculty of Engineering Teaching Award (2017) and an JSPS Invitational Fellowship (2020). He is a Fellow of the Optical Society of America (OSA), the Society for Photographic Instrumentation Engineers (SPIE), and the Institute for Electrical and Electronic Engineers (IEEE). Dr. Gordon has authored and co-authored over 170 journal papers (including 13 invited contributions). He is co-inventor for five patents and two patent applications. Dr. Gordon is a Professional Engineer of BC. Dr. Gordon has been recognized as an "Outstanding Referee" by the American Physical Society. He has also served as conference chair for several conferences, including SPIE NanoScience + Engineering and NFO16. Dr. Gordon is an Associate Editor for Optics Express and on the Editorial Advisory Board for Advanced Optical Materials.
Pramey Upadhyaya
Chair TC 5: Spintronics
Pramey Upadhyaya is an Assistant Professor of Electrical and Computer Engineering at the Purdue University. Before joining Purdue, Pramey was a postdoctoral scholar in the Physics and Astronomy Department, University of California Los Angeles, working under the mentorship of Prof. Yaroslav Tserkovnyak. He earned his bachelor’s degree in Electrical Engineering from the Indian Institute of Technology Kharagpur, India, in 2009, and the master’s and Ph.D. degree in Electrical Engineering department from the University of California Los Angeles, USA, in 2011 and 2015, respectively. During his Ph.D., he was a resident theorist in the experimental group (Device Research Laboratory) led by Prof. Kang Wang. His research has explored the theory of classical and quantum spintronic phenomenon and their device applications, enabled by electrical and thermal control of magnetism. Along with his teammates, this work has resulted in one of the earliest demonstrations of current-induced room-temperature skyrmion manipulations, spin torque switching by topological surface states and NV-center probing of spin-caloritronics. These works have resulted in over 30 publications in journals including Science, Physical Review Letters, Nature Nanotechnology, Nature Materials and Nature Communications. He is a recipient of NSF CAREER (2020), Qualcomm Innovation fellowship (2013) and Intel summer fellowship (2011).
Malgorzata Chrzanowska-Jeske
Chair TC 6: Nanoelectronics
Malgorzata Chrzanowska-Jeske is Professor of Electrical and Computer Engineering and Director of the VLSI & Emerging Technology Design Automation Laboratory at Portland State University. From 2004 to 2010 she was Chair of the ECE department at PSU, which she joined in 1989. She holds M.S. degree in electronics engineering from Politechnika Warszawska Warsaw, Poland, and the PhD degree in electrical engineering from Auburn University, Auburn, Alabama. Her research interests include CAD for VLSI ICs, MS-SOCs, 3D ICs, nanotechnology and nano/bio systems, design for manufacturability and design issues in emerging and renewable technologies. She has presented tutorials, keynote and invited talks at various international conferences and events. She has published more than 150 technical papers and serves as a panelist and reviewer for the National Science Foundation (NSF), and as a reviewer for National Research Council Canada (NRC) and many international journals and conferences. Her research has been supported by the NSF and industry. Dr. Chrzanowska-Jeske has served in various roles on the Technical, Steering, and Organizing Committees of many international conferences and workshops, as Associate Editor for TCAS II, Senior Editor, Associate Editor and Guest Editor of various international journals. Currently, she serves as Vice President for Finances of the IEEE Nanotechnology Council (NTC) and on Editorial Board of Nano Express, IOP Publishing. She served as IEEE NTC Vice President for Technical Activities and on BoG of IEEE CASS. She was a chair and a founding-member of Women in CAS Society, WiCAS. She presented keynote, plenary and tutorial lectures at various international conferences. She received 2008 Donald O. Pederson Best Paper Award in IEEE TCAD and the Best Paper Award for the best IEEE Transaction paper in Alabama Section in 1990 She is a Life Senior Member of IEEE.
Inkyu Park
Chair TC 7: Nanosensors and Nanoactuators
Prof. Inkyu Park received his B.S., M.S., and Ph.D. from KAIST (1998), UIUC (2003) and UC Berkeley (2007), respectively, all in mechanical engineering. He has been with the department of mechanical engineering at KAIST since 2009 as a faculty and is currently a KAIST Endowed Chair Professor and Full Professor. Prior to joining KAIST, he was a research specialist at Berkeley Sensor and Actuator Center (BSAC) in 2007-2008, CTO & Co-founder of nPrintSolutions, inc. in 2008-2009, and visiting researcher at Hewlett Packard Laboratory in 2005-2008. His research interests are nanofabrication, smart sensors, nanomaterial-based sensors, flexible & wearable electronics, self-powered sensors, and sensors for environmental and healthcare monitoring applications. He has published more than 120 international journal articles (SCI indexed) and 160 international conference proceeding papers in the area of MEMS/NANO engineering (h index=38, total citation >7600). He is a recipient of IEEE NANO Best Paper Award (2010), HP Open Innovation Research Award (2009-2012), KINC Fusion Research Award (2016, 2018), Grand Prize of KAIST School of Engineering Research Innovation Award (2020), and Excellent Researcher Award from the Society of Micro/Nano-Systems (2020). (Website:; Email:
Dominique Baillargeat
Chair TC 8: Nano-Materials
Dominique BAILLARGEAT (52) is Senior Member IEEE and was IEEE Nanotechnology Council Distinguished Lecturer in 2018 and 2019. He is Professor at the University of Limoges (France). Since September 2019, he is appointed as Scientific Executive Director of the CNRS@CREATE Ltd, in the framework of the Campus for Research And Technological Enterprise (CREATE) of the National Research Foundation (NRF) of Singapore. CNRS@CREATE Ltd, which is CNRS’ first overseas subsidiary, will work with Singapore’s universities, research institutions, and CREATE’s international partners to conduct research and application of technologies in areas that are relevant to Singapore’s social and economic needs. From September 2013 to August 2019 he was the Director of XLIM a joint research institute of 460 members of CNRS and University of Limoges. He was also the Director of the Lab of Excellence SIGMA_LIM, a 8 years project, on innovative materials, technologies and software architectures dedicated to the future smart and highly integrated communication systems. From September 2009 to August 2013 he was the Director of the research laboratory CINTRA in Singapore, a joint lab. between the CNRS, NTU and Thales. The vision of this framework is to develop nanotechnologies for electronics. D Baillargeat has done lot of research activities on the design of passive RF devices and on innovative packaging solutions for 3D heterogeneous integration. His research work is in the following areas: (1) EM modelling and design of RF components and modules, (2) 2D/3D additive manufacturing processes (3) nano-modelling and nano-characterization techniques for assisting the development of carbon-based devices (solutions for RF nanopackaging (interconnect), RF components, sensors, etc.) Prof D Baillargeat have been involved in many projects (past and present) either as XLIM scientific responsible or collaborator through fundings from the French Research Agency, European Community, ESA, CNES or with industrial partners (Thales, EADS etc..). He has been the advisor of 33 graduated PhD students. D Baillargeat co-authored more than 80 articles in international journals and books, and 200 communications in international conferences.
Peng Li
Chair TC 9: Nano-Metrology and Characterization
Li Peng received his BS degree in Automation from Sichuan University, Chengdu, China in 2009, and the Ph.D. degree in Mechanical and Electrical Engineering from Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China, in 2015. And then he worked as assistant professor in National Center for Nanoscience and Technology (NCNST), Beijing, China. He is currently an assistant professor at Beijing University of Technology (BJUT). His research interests center on micro/nanorobotics systems; scanning probe microcopy; precision instrument design; nanodevices and biosensors; and real-time design and integration.
Anant M.P. Anantram
Chair TC 10: Modeling and Simulation
Anant M. P. Anantram is a Professor in the Department of Electrical and Computer Engineering at the University of Washington. His research involves the theory and modeling of nano scale devices and materials with an aim to understand the underlying device physics of both semiconductor and bio nanostructures. The modeling of nanostructures is a rich and complex area, where we use both Monte Carlo and molecular dynamics approaches to find the atomic coordinates. To calculate the electronic properties, we use both density functional theory and tight binding methods. To study the electrical transport properties of nanostructures, we develop both algorithms and code based on Green’s function methods. The current application areas in his group are (i) SemiSynBio systems including origami structures (ii) quantum coherence-decoherence in nanostructures and (iii) memory devices. Anant obtain a B.Sc in Applied Science from PSG College of Technology in Koyampuththoor, M.Sc in Physics from Pune University, India, and Ph.D in Engineering from Purdue University. He worked at the Center for Nanotechnology at NASA Ames Research Center and the University of Waterloo before moving to Seattle.
Pulugurtha Markondeya Raj
Chair TC 11: Nanopackaging
Dr. P. M. Raj‘s expertise is in packaging of electronic and bioelectronic systems, with emphasis on nanoscale RF, power and bioelectronic components, and active and passive integration in ultrathin embedded modules. He is an Associate Professor in Biomedical Engineering and Electrical and Computer Engineering at Florida International University, and Adjunct Professor at Georgia Institute of Technology, Atlanta. He demonstrated several electronic packaging technologies, working with the whole electronic ecosystem, which include several semiconductor, packaging and material, tool, and end-user companies. He co-lead the development of world’s first 3D glass LTE diversity module, and 3D glass antenna-integrated package module for 5G mm wave applications. He developed advanced substrate-integrated power inductors and power capacitors for integrated power modules and voltage regulators. He is widely recognized for his contributions in integrated passive components and technology roadmapping, component integration for bioelectronic, power and RF modules, and also for promoting the role of nanomaterials and nanostructures for electronics packaging applications through IEEE NTC and EPS. His research led to 330 publications, which include 8 patents. He received more than 25 best-paper awards. He co-advised more than 30 MS and PhD students who are current leaders and technology pioneers in the electronic packaging industry. He is the Chair of Nanopackaging Technical Committee, EPS Representative of IEEE Nanotechnology Council, IEEE Distinguished Lecturer in Nanotechnology for 2020, Associate Editor for IEEE Nanotechnology Magazine and Transactions of Components, Packaging and Manufacturing Technologies (T-CPMT). He served as a Session Chair in more than 12 IEEE flagship conferences. He has been instrumental in forming Nanopackaging technical sessions at the IEEE Nanotechnology Conference. He has been actively involved with the PSMA (power sources manufacturers Association) and takes pro-active role in shaping up power electronics sessions at APEC and PEIM conferences. He received his PhD from Rutgers University in 1999 in Ceramic Engineering, ME from the Indian Institute of Science, Bangalore and BS from the Indian Institute of Technology, Kanpur (1993).
Chih-Huang Lai
Chair TC 12: Nanomagnetics
Prof. Lai received his Ph.D. in Materials Science and Engineering from Stanford University in 1997. He joined Read-Rite Co. and worked on TMR and GMR magnetic heads. He became an assistant Professor in National Tsing Hua University (NTHU) in 1998. Prof. Lai is currently Dean of College of Engineering in NTHU and Tsing Hua Chair Professor. His research works focus on magnetic materials, spintronic devices and CIGS thin film solar cells. He served as Education Chair, Publicity Chair and Membership Chair for IEEE Magnetics Society and President of Taiwan Association of Magnetics Technology. He has published more than 200 peer-reviewed SCI papers and obtained more than 40 patents. He is an IEEE Fellow and MRS-Taiwan Fellow.
Zhan Yang
Chair TC 13: Nano Energy, Environment and Safety
Zhan Yang received his B.S., M.S., and Ph.D. from Harbin University of Science and Technology in Automation Engineering , Nagoya University (2010,2014) in Micro-Nano System Engineering respectively. He has been an associate professor with the School of mechanical and electrical engineering and Center of Robotics and Microsystem at Soochow University since 2013. He is NTC Adcom Member, Member Representative, Robotics & Automation Society (RA) in 2017,2018 and 2020. He has been serviced as workshop Chair of IEEE NANO 2017, Publicity Chair of IEEE NANO 2019, Program Co-chair of IEEE NEMS 2019. His research interest are nanorobotics, nanomanipulation and CNT based-nanodevices. He has published more than 50 papers supported by National Science Funding of China and Key Research Program of China. He is the Secretary General of Nano Robotics Society of China.
Andrew Eckford
Chair TC 14: Nanoscale communications
Andrew Eckford is an Associate Professor in the Department of Electrical Engineering and Computer Science at York University, Toronto, Ontario. His research interests include the application of information theory to biology, and the design of communication systems using molecular and biological techniques. His research has been covered in media including The Economist, The Wall Street Journal, and IEEE Spectrum. His research received the 2015 IET Communications Innovation Award, and was a finalist for the 2014 Bell Labs Prize. He is also a co-author of the textbook Molecular Communication, published by Cambridge University Press. Andrew received the B.Eng. degree from the Royal Military College of Canada in 1996, and the M.A.Sc. and Ph.D. degrees from the University of Toronto in 1999 and 2004, respectively, all in Electrical Engineering. Andrew held postdoctoral fellowships at the University of Notre Dame and the University of Toronto, prior to taking up a faculty position at York in 2006. He has held courtesy appointments at the University of Toronto and Case Western Reserve University. In 2018, he was named a Senior Fellow of Massey College, Toronto.
Xiaoning Jiang
Chair TC 15: Nano-acoustic devices, Processes and Materials
Dr. Xiaoning Jiang is a Distinguished Professor of Mechanical and Aerospace Engineering and a University Faculty Scholar at North Carolina State University. He is also an Adjunct Professor of Biomedical Engineering at North Carolina State University and University of North Carolina, Chapel Hill. Dr. Jiang received his Ph.D. degree from Tsinghua University (1997) and his Postdoctoral training from the Pennsylvania State University (1997-2001). He was the Chief Scientist and Vice President for TRS Technologies, Inc. prior to joining NC State in 2009. Dr. Jiang is the author and co-author of two books, 6 book chapters, 9 issued US Patents, over 120 peer reviewed journal papers and over 100 conference papers on piezoelectric ultrasound transducers, ultrasound for medical imaging and therapy, drug delivery, ultrasound NDT/NDE, smart materials and structures and M/NEMS. Dr. Jiang is a member of the technical program committee for a few international conferences including IEEE NANO, IEEE Ultrasonics Symposium (TPC-5), IEEE NMDC, SPIE Smart Structures and NDE, and ASME IMECE. He serves as the Nano-Acoustics Technical Committee Chair in IEEE NTC, IEEE NTC Distinguished Lecturer (2018 and 2019), an editorial board member for the journal Sensors, a Senior Associate Editor for the ASME Journal of Engineering and Science in Medical Diagnostics and Therapy, and a Co-Editor-in-Chief of IEEE Nanotechnology Magazine (2020-2021). Dr. Jiang is an ASME Fellow.
James Spicer
Co-Chair TC 15: Nano-acoustic devices, Processes and Materials
James Spicer is a professor of Materials Science and Engineering at The Johns Hopkins University in Baltimore, Maryland. He is the chair of Materials Science and Engineering Program in the Engineering for Professionals Program and is a member of the Principal Professional Staff at The Johns Hopkins Applied Physics Laboratory. His research focuses on laser-material interactions for advanced processing and materials characterization including ultrafast studies of nanoscale thermal and acoustic transport, polymer matrix nanocomposite processing and characterization, optical and ultrasonic characterization of additively manufactured materials, development of opto-thermal barrier coatings for space probes and characterization of high-energy laser materials. He is a member of the IEEE Nanotechnology Council, the IEEE Ultrasonics, Ferroelectrics and Frequency Control Society and the IEEE Sensors Council. He is also a member of ASME, OSA, MRS and APS.
Giovanni Finocchio
Chair TC 16: Quantum, Neuromorphic, and Unconventional Computing
GF is Associate Professor of Electrical Engineering at University of Messina, Italy. He got his PhD (XVIII cycle) in “Advanced Technologies for Optoelectronics, Photonics and Electromagnetic Modeling”. Coordinator at the University of Messina for the SpintronicFactory ( GF is co-authors of more than 180 papers (h-index 33 and > 3400 citations) published in well-established international journals including 2 Nature Communications, 3 Nature Electronics and 1 Advanced Materials. GF was co-inventor of 5 patents, co-founder of two spin-off companies. GF has organized as chair, co-chair or member of the scientific committee several conferences (magnonics, hysteresis modeling and micromagnetics (HMM)) and he also co-organized more than 10 workshops in Messina. GF is regularly invited at international conferences in magnetism and spintronics, he gave more than 70 invited talks at conferences, universities and industries. Currently, GF has more then 10 active international collaborations on different topics in the field of applied magnetism and spintronics. Since 2019, GF is chair of the Italy Chapter of the IEEE Magnetics Society. In 2020 the chapter was awarded as “Best Chapter” from IEEE Italy section. GF is an elected member of the AdCom of the IEEE Magnetics Society for the years 2020-2022. Since 2013, steering committee member of the HMM conferences (Hysteresis Modeling and Micromagnetics), GF was chair of the committee from 2015 to 2019. President of the PETASPIN association which main missions are to support scientific research in many fields of engineering and applied physics, particularly in the field of magnetism, and to disseminate scientific results through conferences and meetings, also organized in collaboration with other institutions and associations. PETASPIN has more than 12000 contact of people working in magnetism and related field and has organized several events and virtual activities (
Seiji Samukawa
Chair TC 17: Emerging Plasma Nanotechnologies
Joined NEC in 1981 after graduating in Instrumentation Engineering from Keio University. Worked on the research and development of ultra-precise plasma etching processes for ULSI devices. Promoted to Principal Researcher in Microelectronics Laboratory, R&D Group NEC Corporation. Obtained a Ph.D. in Instrumentation Engineering from Keio University in 1992. Prof Samukawa, early in his career at NEC in Japan, recognized the importance of developing plasma processing technologies that mitigated process related device damage. His first major contribution addressed the requirement for ultralow plasma potentials and electron temperatures along with superior species flux uniformity to reduce damage. This contribution foretold the emergence of what is today’s ultrahigh frequency plasma sources, capacitively coupled VHF and microwave-based that are critical for damage-free plasma processing. Since July 2000, he has been a full professor at Tohoku University, an institution renowned for contributions to damage-free process and leading edge device technology, where he is currently Director of the Innovative Energy Research Center at the Institute of Fluid Science (IFS) Tohoku University. He is also a Principal Investigator (PI) at Advanced Institute of Materials Research (AIMR) Tohoku university, deputy director of Material Solutions Center (MaSC) Tohoku university, Joint appointment Fellow of National instituite of advanced industrial science and technology (AIST) and also Chair Professor of National Chiao Tung University (Taiwan). The trend in research at the time was the manipulation of plasmas using magnetic fields, negative ion extraction to minimize the impact of charge imbalances in features and energetic species on devices. Prof. Samukawa, rather than rushing into the fray, took a careful diagnostics-based approach. He first characterized the impact of different kinds of radiation on the device results. New plasma pulsing technology was matched to the core issues he identified. His original patents for plasma pulsing technology are key references for much of the patented plasma pulse technology that has followed. Pulse-time-modulated plasma etching and nitridation systems have been widely introduced into mass-production lines for sub-90 nm generation devices. Now, 50 percent of all plasma etch systems include pulse-modulated plasma functions. According to the latest information, going forward pulse-modulated plasma associated technologies are expected generate nearly a few billions $ in revenue per year. Always ahead of the curve, in 2000, Prof. Samukawa demonstrated damagefree top-down etching using a newly developed neutral beam etching system. Neutral beam etching is the ultimate goal for nanofabrication to achieve charge-free and UV photon irradiation damage-free processes. He was the first to demonstrate that neutral beams can be efficiently generated by the Your information may be shared with other areas within IEEE who seek volunteers. acceleration of negative ions in pulsed plasmas followed by their neutralization. With this method, he generated high-density, low-energy neutral beams with neither charged particles nor UV photons incident onto the substrate surface; and demonstrated damage-free etching, oxidation and deposition for sub-22 nm Si fin-FETs, damage-free etching and oxidation for sub-10nm Ge fin-FETs, and damage-free gate recess etching for high-frequency noise performance of Al2O3/AlGaN/GaN MOS HEMT. Combining biotechnology with neutral-beam-based nano-processes, i.e., bio-nano templating processes, he fabricated sub-10 nm diameter and high-density nano-disk array structures (Si, InGaAs, InGaN and 2D materials). The quantum effects of these structures were demonstrated at room temperature due to the damage-free etched surfaces made possible by neutral beam etching. Also relying on Si and InGaN nanodisk structures, he is developing quantum dot (QD) solar cells with high energy conversion efficiencies of more than 45% and QD Green LED with high internal quantum efficiencies. His significant scientific achievements earned him Ichimura Award (2008) in the New Technology Development Foundation, Prizes for Science and Technology; The Commendation for Science and Technology by the Minister of Education, Culture, Sports, Science and Technology (2009), Plasma Prize in American Vacuum Society (2010) and IEEE NTC Distinguished Lecturers (2019). Additionally, he has been elected as a “Distinguished Professor” of Tohoku University, a “Fellow” of the Japan Society of Applied Physics (JSAP) since 2008, a “Fellow” of American Vacuum Society (AVS) since 2009 and a also “Fellow” of Institute of Electrical and Electronics Engineers (IEEE) since 2018.