IEEE Nanotechnology Council
Advancing Nanotech for Humanity

EIPBN 2023 Call for Abstracts

66th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication​

May 30 – June 2, 2023
Hilton San Francisco Union Square
San Francisco, California

The International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), affectionately known as “3-Beams,” is the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging, and analysis; atomically precise fabrication; nanofabrication process technologies; related emerging technologies; and their applications in a broad spectrum of fields. This is the 66th meeting of the EIPBN, where top researchers from academia, government laboratories, and industry from around the world meet to present and discuss recent trends and future directions in these technologies. IEEE NTC is a techncial sponsor of EIPBN.

Abstract Submission

The deadline for abstract submission is Sunday, January 15, 2023.
Authors will be notified of acceptance by Sunday, April 2, 2023.


Papers presented at EIPBN 2023 shall be submitted for publication in a Special Collection within the Journal of Vacuum Science and Technology B (JVST B). Deadline for manuscript submission to JVST B is Monday, July 31, 2023. Papers will be peer reviewed and must meet JVST standards for technical content. Manuscripts must be written in English. All manuscripts are reviewed to the same standards as regular JVST submissions.

Please note that acceptance to present at the EIPBN conference does not guarantee the acceptance of your manuscript in JVST B.

Technical Scope
This year’s theme is, “Nanofabrication and Integration for the AIoT Era: Challenges and Opportunities.” Abstracts representing original research are invited in the following areas:

Advanced micro/nanolithography
AR/VR devices
Atomically precise fabrication
Bioinspired nanostructures and engineered surfaces
Cold atom ion and electron sources
Cutting-edge industrial developments
Directed self-assembly
Electron and ion-beam lithography
Flexible/wearable electronics and sensors
Implantable devices
Metamaterials, metasurfaces, and meta-optics
Micro/nanoelectromechanical systems (MEMS/NEMS)
Nano-biology and medicine
Nanofabrication for energy applications
Nanofabrication for neuromorphic computing
Nanofabrication for quantum computing
Nanoimprint lithography
Nanophotonics and plasmonics
Novel architectures and 2.5D/3D integration
Personalized healthcare
Resists and resist processing
Scalable micro/nanomanufacturing
Scanning probes techniques
Simulation, modeling, and design tools for nanofabrication
Structural color and displays
Synthesis and integration of 0D/1D/2D nanomaterials


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