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First Meeting of the NTC Technical Committee on Emerging Plasma Nanotechnologies

Dear Colleagues,

It is a pleasure to announce the first meeting of the newborn Technical Committee on Emerging Plasma Nanotechnologies of the IEEE Nanotechnology Council. This first edition, planned for February, 9th, 2022, will start at 5:00pm CET, Paris time zone, (which will be 8:00am PST, 11:00am EST, 1:00am(+1day) JST). It will be virtual with a very exiting program with speakers either from academia and industry. This time we have a special focus on advanced device development/plasma processes including AI/ML/big data. The list of the speaker is the following:

5:00 – 5:45 pm (CET)
Prof. Seiji Samukawa, Tohoku University, Japan
Introduction of IEEE Nanotechnology Council and Emerging Plasma Nanotechnologies Technical Committee
Plasma Nanotechnology Introduction/Background

5:45 – 6:20 pm (CET)
Prof. Masaru Hori, Nagoya University, Japan
Internal parameter analysis by random forest model in PECVD of amorphous carbon films

6:20 – 6:55 pm (CET)
Dr. Thorsten Lill, Lam Research, USA
Plasma technologies for etching of 3D integrated memories

6:55 – 7:30 pm (CET)
Dr. Alok Ranjan & Dr. Shyam Sridhar, Tokyo Electron America, Inc., USA
Emerging plasma technologies enabling logic and memory scaling roadmaps

Dr. Peter Ventzek
Prof. Uros Cvelbar
Dr. Kremena Makasheva

Members of TC17 Emerging Plasma Nanotechnologies Technical Committee, IEEE Nanotechnology Council



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